Physics | Optics internship: fast modeling of electron optical systems

Introduction

Within ASML, the Scanning Electron Microscopy (SEM) group focusses on fundamental understanding and novel solutions to advance our e-beam metrology tools used in the semiconductor industry. We are developing the next generation models to better predict the performance of our future tools. You, as an intern, can be part of the unique work we do.

Your Assignment

In this internship assignment, you will create a software framework to model electron optical components using fitted transfer matrices, compacted into a surrogate model. The goal of is to make beam transport simulations much faster by using smart compression methods, without losing accuracy. The framework should also include a calibration tool that can build detailed transfer matrices and compact surrogate models for quick, real-time use. Some of the expected outcomes include: